摘要

We studied electrical characteristics in c-pane (0001) and m-plane (10-10) GaN by nanoindentation examination with a conductive diamond indenter. At constant voltage during partial indentation, the current density increased stepwise as the loading-unloading cycle went by in c-plane GaN and was constant in m-plane GaN. During several constant-indentation loads, the turn-on voltage decreased with increasing indentation load in c-plane GaN and was constant in m-plane GaN. We investigated the piezoelectric polarization anisotropy by in situ electric measurement while controlling strain in GaN crystals.

  • 出版日期2011-11-28