Optical properties of a-GaN film deposited by DC magnetron sputtering

作者：Pan Xiao Jun; Zhang Zhen Xing; Jia Lu; Li Hui; Xie Er Qing^*

来源：Journal of Inorganic Materials, 2007, 22(4): 725-728.

• amorphous GaN
• DC sputtering
• optical properties

GaN thin films were prepared by direct current (DC) planar magnetron sputtering on Si and SiO2. The films were characterized by X-ray diffraction (XRD), Raman, Fourier Transform Infrared Spectroscopy (FTIR), photoluminescence (PL) and UV-Vis spectra. XRD and Raman spectrum show that the films are amorphous. Fourier infrared absorbance spectrum shows that the main absorbance is Ga-N stretching vibration. 360nm ultraviolet emission is obtained at room temperature. UV-Vis result shows that the optical band gap of the films is 3.74eV, which is consistent with photoluminescence spectrum result.

• 出版日期2007-7
• 单位兰州大学