A novel in-situ measuring technique for aspheric surface

作者：Zhang Chuan^*; Wang Ping; Chen YaoLong

来源：International Conference on Optical Instruments and Technology (OIT) - Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 2011-11-06 to 2011-11-09.

DOI：10.1117/12.903600

• in-situ measurement
• aspheric surface
• error correction
• computer numerical controlled

In this paper, a novel in-situ surface measuring technique for optical elements with aspheric surface is presented. It is a contact type probe, and can be used for measuring ground surfaces. The theory of this technique develops from coordinate measuring machine (CMM), and the measurement accuracy of this technique is depended on the accuracy of computer numerical controlled (CNC). By installing a special equipment with high accuracy measuring head in main spindle of CNC machine, and moving the probe along the path which is described by a mathematical aspheric expression precisely, we could get relative errors of sag height of any position in this path. With this technique, the repeat positioning error caused by traditional off-line measurement will be avoided. The author also has finished a special software with VC++ 6.0. With this software, the form error of ground work piece could be corrected rapidly. This software can calculate and handle the arrangement automatically with all parameters which are required to input in operation interface. In the correction stage, the software can analyze and process error data and generate a new NC program with corrected data for next grinding stage. After 2 or 3 times measuring and correction, the surface shape error of the aspheric optical element will be less than 1 mu m. The finished work piece has a very good surface finish and can be polished with high quality.

• 出版日期2011
• 单位北京理工大学