An all-metal material for high-sensitivity geomagnetic sensors with improved magnetic stability by magnetostatic coupling

作者：Ding, Lei^*; Teng, Jiao; Feng, Chun; Li, Wei; Li, Min; Zhang, Min; Yu, Guanghua; Xiang, Daoping

来源：Journal of Physics D: Applied Physics , 2011, 44(38): 385001.

DOI：10.1088/0022-3727/44/38/385001

• FILMS

An all-metal material with a Ta/NiFe(I)/IrMn/NiFe(II)/NiFeCr/NiFe(III)/Pt/Ta structure is designed and synthesized for high-sensitivity geomagnetic sensors. When the material is fabricated into sensor elements, the magnetic sensitivity reaches 3.1 mV V(-1) Oe(-1) which is close to that of some tunnel magnetoresistance elements. More importantly, pinned NiFe (II) and sensing NiFe (III) layers yield magnetostatic coupling through the NiFeCr layer, resulting in good magnetic stability of elements. As the whole structure consists of all-metal layers, lattice distortion or nanoscale defects caused by the difference of thermal expansion coefficient during the heat-treatment process may not appear, ensuring good magnetic properties of the related elements.

• 出版日期2011-9-28
• 单位北京科技大学; 海南大学