Microstructure of sol-gel derived TiO2 thin films characterized by atmospheric ellipsometric porosimetry

作者：Bockmeyer Matthias; Herbig Bettina; Loebmann Peer

来源：Thin Solid Films, 2009, 517(5): 1596-1600.

DOI：10.1016/j.tsf.2008.09.079

• Sol-gel
• Titania
• Ellipsometry
• Thin films
• Photocatalytic activity
• TiO2

Adsorption of water vapor during ellipsometric measurements was performed in-situ for the characterization of sol-gel derived TiO2 thin films. The data obtained were compared with complementary results derived from scanning electron microscopy and photocatalytic degradation measurements. Results indicate that a less permeable surface layer encapsulates the porous interior of the films which may become more accessible by defects such as cracks. Atmospheric ellipsometric porosimetry provides a valuable tool for the microstructural characterization of sol-gel films.

• 出版日期2009-1-1