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摘要
Eddy current sensors (ECSs) are widely used for non-contact displacement measurement. In this note, the quantitative error of an ECS caused by target conductivity was analyzed using a complex image method. The response curves (L-x) of the ECS with different targets were similar and could be overlapped by shifting the curves on x direction with root 2 delta/2. Both finite element analysis and experiments match well with the theoretical analysis, which indicates that the measured error of high precision ECSs caused by target conductivity can be completely eliminated, and the ECSs can measure different materials precisely without calibration.
- 出版日期2015-1
- 单位中国科学技术大学
