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摘要
We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
- 出版日期2013-1
