An oblique angle radio frequency sputtering method to fabricate nanoporous hydrophobic TiO2 film

作者：Chatterjee Sriparna^*; Kumar Mohit; Gohil Smita; Som Tapobrata

来源：Thin Solid Films, 2014, 568: 81-86.

DOI：10.1016/j.tsf.2014.08.005

• Oblique angle sputter deposition
• Titanium dioxide
• Thin films
• Columnar array
• Hydrophobic surface

In this work, we investigate growth of ordered arrays of amorphous TiO2 nano-columns by using radio frequency sputter deposition technique. The as-prepared thin films were characterized by atomic force microscopy, field emission scanning electron microscopy, X-ray diffraction, and ultraviolet-visible spectroscopy. The nano-columnar films are found to be porous in nature which results from glancing angle sputter deposition. In fact, porosity has a linear relationship with increasing deposition angle. Reflectance of the thin films is also studied as a function of porosity. In addition, contact angle measurements demonstrate the roughness dependent transition from a hydrophilic to a hydrophobic TiO2 surface.

• 出版日期2014-10-1