An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

作者：Takahashi Yukio^*; Kubo Hideto; Nishino Yoshinori; Furukawa Hayato; Tsutsumi Ryosuke; Yamauchi Kazuto; Ishikawa Tetsuya; Matsubara Eiichiro

来源：Review of Scientific Instruments, 2010, 81(3): 033707.

DOI：10.1063/1.3361265

• crystal structure
• CVD coatings
• nanostructured materials
• X-ray diffraction
• X-ray microscopy

We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3x10(7) electrons/pixel was successfully reconstructed.

• 出版日期2010-3