Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures

作者：Belic Domagoj; Shawrav Mostafa M; Gavagnin Marco; Stoeger Pollach Michael; Wanzenboeck Heinz D^*; Bertagnolli Emmerich

来源：ACS Applied Materials & Interfaces, 2015, 7(4): 2467-2479.

DOI：10.1021/am507327y

• FEBID
• gold nanostructure
• nanopillar
• nanowire
• purity
• FEBIC
• oxygen plasma cleaning

Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures. Unfortunately, FEBID Au traditionally suffers from a high nonmetallic content and cannot meet the purity requirements for these applications. Here we report exceptionally pure pristine FEBID Au nanostructures comprising submicrometer-large monocrystalline Au sections. On the basis of high-resolution transmission electron microscopy results and Monte Carlo simulations of electron trajectories in the deposited nanostructures, we propose a curing mechanism that elucidates the observed phenomena. The in situ focused-electron-beam-induced curing mechanism was supported by postdeposition ex situ curing and, in combination with oxygen plasma cleaning, is utilized as a straightforward purification method for planar FEBID structures. This work paves the way for the application of FEBID Au nanostructures in a new generation of biosensors and plasmonic nanodevices.

• 出版日期2015-2-4