Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

作者：Amato Letizia^*; Heiskanen Arto; Hansen Rasmus; Gammelgaard Lauge; Rindzevicius Tomas; Tenje Maria; Emneus Jenny; Keller Stephan S

来源：Carbon, 2015, 94: 792-803.

DOI：10.1016/j.carbon.2015.06.014

In this work we present high-aspect ratio carbon pillars (1.4 mu m in diameter and similar to 11 mu m in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface-and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.

• 出版日期2015-11