Deposition and structuring of Ag/AgCl electrodes inside a closed polymeric microfluidic system for electroosmotic pumping

作者：Heuck F; van der Ploeg P; Staufer U^*

来源：Microelectronic Engineering, 2011, 88(8): 1887-1890.

DOI：10.1016/j.mee.2011.01.058

• Electroosmotic pump
• Ag/AgCl electrodes
• Electroless deposition
• Microfluidic stopvalve

The design, fabrication and analysis of a low voltage electroosmotic (eo) pump with integrated Ag/AgCl electrodes are shown. The fabrication was based on casting the hydrophilic polymer NOA63, capping the NOA63 trenches with a glass-slide and subsequently depositing Ag/AgCl electrodes by a flow of electroless solution and structuring the electrodes by microfluidic stopvalves. The herewith obtained eo pump embedded into the microfluidic system had a capillary cross-section of 65 mu m x 55 mu m and its flow rate was determined to be 0.12 nl s(-1) V-1 U-eh within the range of applied voltages U-eh from -1.5 up to 1.5 V.

• 出版日期2011-8