A set of cross sections and transport coefficients for electrons in HBr

作者：Sasic O^*; Dujko S; Makabe T; Petrovic Z Lj

来源：Chemical Physics, 2012, 398: 154-159.

DOI：10.1016/j.chemphys.2011.08.019

• HBr
• Swarms
• Cross sections
• Transport coefficients
• Fluid models
• Plasma etching

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E x B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

• 出版日期2012-4-4