An exact calculation of the N-2(+) and H-2(+) influx at cathode surface in N-2-H-2 discharges

作者：Suraj K S^*; Alex Prince

来源：Results in Physics, 2014, 4: 73-74.

DOI：10.1016/j.rinp.2014.05.005

• Glow discharge
• Plasma nitriding
• Ion influx
• Sheath

An exact calculation of N-2(+) and H-2(+) influx, at cathode surface in N-2-H-2 discharge, has been derived using electron impact ionization cross-section at plasma sheath boundary. The analytical formula is very convenient in practical applications. Through the analysis of experimental parameters for glow discharge plasma nitriding, the formula explains, why treatment in an N-2-H-2 mixture with H-2 percentage similar to 70% gives most enhanced result.

• 出版日期2014