Depth-dependence of electrical conductivity of diamondlike carbon films

作者：Sikora A^*; Paolino P; Ftouni H; Guerret Piecourt C; Garden J L; Loir A S; Garrelie F; Donnet C; Bourgeois O

来源：Applied Physics Letters, 2010, 96(16): 162111.

DOI：10.1063/1.3407671

The electrical behavior of diamondlike carbon (DLC) has been measured as a function of depth. The amorphous carbon (a-C) films are deposited by pulsed laser deposition using two complementary setups: a femtosecond (fs) and a nanosecond (ns) pulse lasers. It is demonstrated through four probe resistance measurements and contact resistance mapping that the fs DLC are electrically heterogeneous in thickness. The presence of a thick sp(2) rich layer on top is evidenced for fs a-C and is apparently away in the sp(3) rich ns a-C. It is attributed to different subplantation processes between ns and fs a-C films.

• 出版日期2010-4-19