Athermal silicon ring resonators clad with titanium dioxide for 1.3 mu m wavelength operation

作者：Feng Shaoqi; Shang Kuanping; Bovington Jock T; Wu Rui; Guan Binbin; Cheng Kwang Ting; Bowers John E; Ben Yoo S J^*

来源：Optics Express, 2015, 23(20): 25653-25660.

DOI：10.1364/OE.23.025653

We investigate the athermal characteristics of silicon waveguides clad with TiO2 designed for 1.3 mu m wavelength operation. Using CMOS-compatible fabrication processes, we realize and experimentally demonstrate silicon photonic ring resonators with resonant wavelengths that vary by less than 6 pm/degrees C at 1.3 mu m. The measured ring resonance wavelengths across the 20-50 degrees C temperature range show nearly complete cancellation of the first-order thermo-optical effects and exhibit second-order thermo-optical effects expected from the combination of TiO2 and Si.

• 出版日期2015-10-5