A round-robin test of thermal desorption spectroscopy with quadrupole mass spectrometers calibrated by standard conductance element

作者：Yoshida Hajime^*; Arai Kenta; Fujii Kenichi

来源：Measurement, 2015, 64: 130-137.

DOI：10.1016/j.measurement.2014.12.023

• Vacuum
• Thermal desorption spectroscopy
• TDS
• Calibration
• Quadrupole mass spectrometer

The results of a round-robin test of thermal desorption spectroscopy (TDS) in which the quadrupole mass spectrometer of each participant was calibrated in-situ by a standard conductance element are reported. The desorption rate from three commercially available reference materials was quantified from the calibration results, and compared among the three participants. The total reported desorption amounts of hydrogen and argon molecules from the reference materials showed agreement within about 10%. The degree of equivalence of three TDS apparatuses was discussed. It is also shown that the quantification of the gas desorption amounts yields us the appropriate relative ratio between desorbed gas species.

• 出版日期2015-3