A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

作者：Demirel Kaan^*; Yazgan Erdem; Demir Simsek; Akin Tayfun

来源：Microsystem Technologies, 2017, 23(5): 1191-1200.

DOI：10.1007/s00542-016-2892-5

Design and fabrication of a folded leg Ka-band RF micro electro mechanical systems (RF MEMS) is presented. The mechanical design is carried out to observe minimum permanent deformation on the MEMS bridge after our in-house MEMS packaging process temperature treatment (200 A degrees C). On the other hand, the actuation voltage is aimed as < 30 V and measured as 24-25 V before thermal treatment. Moreover, the switch shows 28-29 V actuation voltage after thermal treatment. The fabricated switch shows -0.4 dB insertion loss for the up state position at Ka-band, before and after heat treatment. The switch is fabricated on quartz wafer using an in-house surface micromachining process with a new amorphous silicon sacrificial layer structure.

• 出版日期2017-5