An improved model for the cantilever NEMS actuator including the surface energy, fringing field and Casimir effects

作者:Farrokhabadi, Amin*; Mohebshahedin, Abed; Rach, Randolph; Duan, Jun-Sheng
来源:Physica E: Low-Dimensional Systems and Nanostructures , 2016, 75: 202-209.
DOI:10.1016/j.physe.2015.09.033

摘要

The influence of the surface energy on the instability of nano-structures under the electrostatic force has been investigated in recent years by different researchers. It appears that in all prior research, the response of all structures becomes softer due to the surface effects. In the present study, the pull-in instability of a NEMS device incorporating the electrostatic force and Casimir intermolecular attraction for different values of the surface parameter is investigated by the Duan-Rach method of determined coefficients (MDC) in order to identify the remarkable effect of the surface energy. Although the obtained results verify the behavior of such structures in presence of the fringing field and the Casimir attraction same as the previous investigations, however the incremental effects of the surface energy cause the aforementioned structures to behave more stiffly in contrast.