Annealing effect on microstructure of ZnO nano-particulate films and VOC gas sensing property

作者：Saito Noriko^*; Watanabe Ken; Aubert Tangi; Grasset Fabien; Sakaguchi Isao; Haneda Hajime

来源：Journal of the Ceramic Society of Japan, 2014, 122(1424): 267-270.

DOI：10.2109/jcersj2.122.267

• Zinc oxide
• Nanocrystal
• Solution process
• Gas sensor

We synthesized ZnO nano-particulate films by a sol-gel method and evaluated their gas sensing properties. A ZnO colloidal solution of 5.6nm sized nanocrystals was prepared from zinc acetate in n-propanol and dip-coated on silica glass substrates. The as-deposited ZnO film consisted of 30nm grains. Annealing the films resulted in a growth of the particles, which was confirmed by scanning probe microscopy and UV-Vis spectrometry. The ZnO film annealed at 400 degrees C worked well as a gas sensor device for volatile organic compounds (VOC) gases. The sensitivity was the best in the case of ethanol gas at 350 degrees C. The sensing performances decreased by annealing at higher temperatures due to the coalescence of the ZnO particles.

• 出版日期2014-4