A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 C

作者：Tan, Qiulin; Li, Chen^*; Xiong, Jijun; Jia, Pinggang; Zhang, Wendong; Liu, Jun; Xue, Chenyang; Hong, Yingping; Ren, Zhong; Luo, Tao

来源：Sensors (Switzerland), 2014, 14(2): 2417-2430.

DOI：10.3390/s140202417

• high-temperature pressure sensor
• in situ test
• alumina ceramic
• LC circuit

In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 degrees C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 degrees C, limited by the sensor test setup. At 600 degrees C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.

• 出版日期2014-2
• 单位中北大学