Microstructure of (110)-oriented epitaxial SrRuO3 thin films grown on off-cut single crystal YSZ(100) substrates

作者：Zhu XH^*; Lee SK; Lee HN; Hesse D

来源：Materials Science and Engineering B-Solid State Materials for Advanced Technology, 2005, 118(1-3): 60-65.

DOI：10.1016/j.mseb.2004.12.048

• microstructure
• epitaxial growth
• SrRuO3 thin films
• azimuthal domains

The microstructure of (1 1 0)(pc)-oriented epitaxial SrRuO3 (SRO) thin films grown by pulsed laser deposition on (100)YSZ (YSZ: yttria-stabilized zirconia) single crystal substrates with a miscut angle of 5 degrees has been investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM). The films grow epitaxially with their pseudocubic (1 10) plane parallel to the (100) surface of the YSZ single crystal substrate, and with an in-plane orientation relationship of [(1) over bar 1 1](SRO)//[0 1 1](YSZ). Cross-sectional TEM investigations show that the films have a rough, facetted surface. Generally, four different azimuthal domains are present in ((1) over bar 1 0)SRO films on (1 0 0)YSZ. Their number can be significantly reduced using annealed offcut YSZ substrates before SRO deposition, and this reduction effect is shown to be much stronger on [0 1 1]-miscut (100)YSZ than on [0 0 1]-miscut ones. Size and morphology of the azimuthal pseudocubic domains and their domain boundaries, as well as of anti-phase domains and their domain boundaries are studied by plan-view and cross-section TEM.

• 出版日期2005-4-25