Note: Helical nanobelt force sensors

作者：Hwang G^*; Hashimoto H

来源：Review of Scientific Instruments, 2012, 83(12): 126102.

DOI：10.1063/1.4769757

We present the fabrication and characterization of helical nanobelt force sensors. These self-sensing force sensors are based on the giant piezoresistivity of helical nanobelts. The three-dimensional helical nanobelts are self-formed from 27 nm-thick n-type InGaAs/GaAs bilayers using rolled-up techniques, and assembled onto electrodes on a micropipette using nanorobotic manipulations. The helical nanobelt force sensors can be calibrated using a calibrated atomic force microscope cantilever system under scanning electron microscope. Thanks to their giant piezoresistance coefficient (515 x 10(-10) Pa-1), low stiffness (0.03125 N/m), large-displacement capability (similar to 10 mu m), and good fatigue resistance, they are well suited to function as stand-alone, compact (similar to 20 mu m without the plug-in support), light (similar to 5 g including the plug-in support), versatile and large range (similar to mu N) and high resolution (similar to nN) force sensors.

• 出版日期2012-12