New insight into direct electrical characterization of graphene utilizing cleavage-based micro four probe

作者:Wang, Renxin; Zhang, Hongze; Wang, Wen; Zhang, Yushi; Liu, Yuan; Xu, Wei; Li, Zhihong*
来源:Journal of Physics D: Applied Physics , 2016, 49(29): 295108.
DOI:10.1088/0022-3727/49/29/295108

摘要

To characterize the electrical properties of arbitrarily shaped small graphene flakes in a direct way, a kind of cleavage-based micro four probe (C-M4P) is developed and a finite element analysis (FEA)-aided approximation method is subsequently proposed. The cleavage process is put forward in the manufacturing of C-M4Ps, which fulfills the releasing of the C-M4P in an ingenious manner. Specifically, we investigate the cleavage process based on simulation and the scanning electron micrograph (SEM). Furthermore, the FEA-aided approximation method brings new insight into the conductivity characterization of arbitrarily shaped small graphene flakes when the geographic correction factor is non-negligible but complicated to figure out. The electrical properties of monolayer graphene flakes applied with back gate voltage are detected by the C-M4P and analyzed through the FEA-aided approximation method, which are proved to be competent for small graphene flake characterization.

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