摘要

Several new types of low-cost and robust magnetic near-field probes manufactured in low-temperature co-fired ceramics (LTCC) are presented in this paper. Parallel C-shaped strips and their variations are inserted into the loop area in the front end of probes to achieve common-mode high-pass and notch filters for electric-field noise suppression. These probes with this kind of filter have excellent wideband electric field suppression. They are called high electric field suppression probes type A similar to D. The size of loop aperture in all probes is 100 mu m long and 400 mu m wide. The signal received from the loop is routed to a measurement apparatus through a semi-rigid coaxial cable with an outer diameter of 0.047 in. The flip-chip junction with low loss and good shielding is used between the probe head in LTCC and the semi-rigid coaxial cable. We take the probes over a 2000-m-wide microstrip line as device-under-test to measure the probe characteristics. The isolation between electric and magnetic fields for a reference probe based on an old design using the same LTCC process is better than 30 dB from 0.05 to 12.65 GHz. The type A probe has two parallel C-shaped strips, it has better isolation of 35 dB from 0.1 to 11.05 GHz. Type C has one end of its strip shorted to ground, its 30-dB isolation frequency range can be extended to 0.05 similar to 17.8 GHz. With additional layout variation in type D, isolation can be improved to 40 dB up to 10.9 GHz. The spatial resolution for these probes is 140 mu m when the distance between the metal surface of the microstrip line and the nearest edge of the loop is held at 120 mu m. The calibration factors of the proposed probes are only slightly increased as compared with reference probe.