A wide-range Parallel Radial Mirror Analyzer for scanning electron/ion microscopes

作者：Khursheed Anjam^*; Hoang Hung Q; Srinivasan Avinash

来源：Journal of Electron Spectroscopy and Related Phenomena, 2012, 184(11-12): 525-532.

DOI：10.1016/j.elspec.2011.08.003

• Parallel electron energy analyzer
• Scanning electron microscope
• Auger electron microscopy

This paper presents the design of a wide-range Parallel Radial Mirror Analyzer (RMA) for use as an attachment inside the specimen chambers of scanning electron/ion microscopes. The range of energies for the PRMA typically varies by a factor of 50, and it is predicted to have second-order focusing properties for all electrons/ions that are detected. For a polar angular spread of +/-3, the simulated energy resolution at an energy of 100 eV is around 0.65%, and it drops to less than 0.2% for energies between 300 eV and 5000 eV. The PRMA is predicted to have a transmittance of over an order magnitude better than previous wide-range parallel energy analyzer designs.

• 出版日期2012-1