A novel multisite silicon probe for high quality laminar neural recordings

作者：Laszlo Grand; Anita Pongracz; Vazsonyi Eva; Gergely Marton; Guban Dorottya; Fiath Richard; Kerekes Balint Peter; Gyoergy Karmos; Istvan Ulbert^*; Gabor Battistig

来源：Sensors and Actuators A: Physical , 2011, 166(1): 14-21.

DOI：10.1016/j.sna.2010.12.019

• Neural interface
• Multichannel silicon probes
• Multielectrodes
• Wet chemical etching
• Local field potentials
• Single unit activity

A novel wet chemical etching process has been developed for the construction of multisite silicon-based neural interfaces. The fabricated probe shaft is 280 mu m wide, 80 mu m thick and 7 mm long. The current probe is equipped with 24 square-shaped platinum recording sites of 30 mu m x 30 mu m. The applied combination of wet chemical etching steps for the formation of the tip and the shaft allows the manufacturing of this neural interface in a wide variety of widths, thicknesses and lengths. Its sharp tip can easily penetrate both the dura and pia mater in animal experiments. The probe exhibits excellent electrophysiological performance when used for the measurement of local field potential, multiple and single unit activity in the cortex.

• 出版日期2011-3