Approach to Error Analysis and Reduction for Rotating-Polarizer-Analyzer Ellipsometer

作者：Mao Peng Hui^*; Zheng Yu Xiang; Cai Qing Yuan; Zhang Dong Xu; Zhang Rong Jun; Zhao Hai Bin; Chen Liang Yao

来源：Journal of the Physical Society of Japan, 2012, 81(12): 124003.

DOI：10.1143/JPSJ.81.124003

• ellipsometry
• optical metrology
• condensed-matter spectroscopy
• optical constants
• dielectric constants

We proposed an approach to error analysis and reduction for the rotating-polarizer-analyzer ellipsometer. The Au bulk sample was taken as an example to confirm the effect of this approach. The results show that the discrete-Fourier-transform (DFT)-induced systematic error can be monotonically reduced by increasing the sampling rate of the analyzer. For further improvement in the measurement accuracy at the same sampling rate of the analyzer, an analytical error reduction method of linearly fitting the delta psi-F (F = psi, Delta, n, and k) distributions was proposed and tested in both theoretical simulation and experimental measurement. The experimentally obtained optical constants from different incident angles are very close to each other, in good agreement with the simulated results, providing a possible means of compensating for the DFT-induced systematic error due to the existence of the random error induced by the light source and detector noise in the measurement system.

• 出版日期2012-12
• 单位复旦大学