A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications

作者:Zolfaghari Parviz; Arzhang Vahid; Zolfaghari Mojtaba
来源:Microsystem Technologies, 2018, 24(7): 3019-3032.
DOI:10.1007/s00542-017-3684-2