Development of in-process visualization system for laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles

作者：Matsuda Keisuke; Takahashi Satoru^*; Takamasu Kiyoshi

来源：International Journal of Precision Engineering and Manufacturing, 2010, 11(6): 811-815.

DOI：10.1007/s12541-010-0097-x

• Metal Structure
• Microfabrication
• Photocatalyst
• Three-Dimensional Structure
• Three-Dimensional Visualization

Recently, microfabrication technology has been used to develop micro-electro-mechanical systems (MEMSs), micro-total analysis systems (mu-TASs), and photonic crystals. Various microfabrication techniques have been proposed; however, a technique that can be used to efficiently fabricate 3-D structures via a simple procedure has not been reported thus far. Because 3-D metal structures have not only mechanical functions but also electromagnetic functions, it is desirable to develop such a technique. Our research group is in the process of developing a new technique for 3-D microfabrication that involves the use of a lower power continuous wave laser. Our technique is characterized by the reduction of silver ions via the photocatalysis of titanium dioxide (TiO2) excited at the laser beam waist. For the analysis and development of our microfabrication technique, we developed a microscope system that enabled us to observe the microfabrication process along the fabrication beam optical axis and its radial direction. We successfully visualized the microfabrication process in 3-D. The visualization showed that when the beam waist was swept, the silver structure grew in 3-D following its path. The effect of the substrate on the deposition condition was examined.

• 出版日期2010-12