A circular microchannel integrated with embedded sprial electrodes used for fluid transportation

作者：Yang Lung Jieh^*; Wang Jiun Min; Ko Kai Chung; Shih Wen Pin; Dai Ching Liang

来源：Sensors and Actuators A: Physical , 2007, 139(1-2): 172-177.

DOI：10.1016/j.sna.2006.10.039

• circular microchannel
• spiral electrodes
• rolling exposure
• electrohydrodynamic (EHD)

This paper proposes a novel method to fabricate a circular microchannel with embedded spiral electrodes used for fluid transportation by inserting glass capillary as sacrificial mould. Utilizing a rolling exposure technique in the photolithography process, the continuous spiral electrode has been formed on the non-planar surface of a glass capillary successfully. Moreover, using the concept of sacrificial layer, the spiral electrodes are transferred on the inner surface of a SU-8 circular microchannel with a diameter of 350 mu m. The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 mu l/min herein.

• 出版日期2007-9-12