X-Ray Scattering Studies of the Surface Structure of Complex Oxide Films during Layer-by-Layer Growth via Pulsed Laser Deposition

作者：Brock J D^*; Ferguson J D; Woll A R

来源：Metallurgical and Materials Transactions A-Physical Metallurgy and Materials Science, 2010, 41A(5): 1162-1166.

DOI：10.1007/s11661-009-9910-5

We report time-resolved X-ray reflectivity and surface diffuse X-ray scattering measurements of the surface evolution during pulsed laser deposition of SrTiO(3) thin films. After developing the scattering theory, we illustrate how these data may used to characterize the kinetics of interlayer transport and of the island size distribution during deposition. We then calculate the density-density correlation function in real space and show that it exhibits the expected features.

• 出版日期2010-5