科研之友
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摘要
A piezoelectric vibration energy harvester with inter-digital IrOx electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800x1000x20 mu m(3), which having a silicon supporting membrane, sol-gel-spin coated Pb(Zr-52, Ti-48)O-3 thin film, and sputtered inter-digitally shaped IrOx electrodes, and silicon inertial mass with 1000x1000x500 mu m(3) to adjust its resonant frequency. The fabricated energy harvester generated 1 mu W of electrical power to 470 k Omega of load resistance and 1.4 Vpeak-to-peak from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW.cm(-3).g(-2). As expected, its electrical failure was significantly improved.
- 出版日期2013-10
