Athermal silicon nitride ring resonator by photobleaching of Disperse Red 1-doped poly(methyl methacrylate) polymer

作者：Qiu Feng; Yu Feng; Spring Andrew M; Yokoyama Shiyoshi^*

来源：Optics Letters, 2012, 37(19): 4086-4088.

DOI：10.1364/OL.37.004086

To fabricate athermal silicon nitride waveguides, the dimensions of both the core and cladding, refractive index, and thermo-optic coefficients must be controlled precisely. We present a simple and effective method for the postfabrication trimming of silicon nitride ring resonators that overcomes the highly demanding fabrication. In order to manipulate the polymer%26apos;s refractive index and thermo-optic coefficient, we bleached the Disperse Red 1-doped poly(methyl methacrylate) (DR1/PMMA) top cladding using UV irradiation. After a suitable bleaching time, the temperature-dependent wavelength shift of the ring resonator was reduced from -9.8 to -0.018 pm/degrees C, which is the lowest shift that we are aware of for an athermal waveguide realized by overlaying a polymer cladding to date.

• 出版日期2012-10-1