Application of hierarchical cascading technique to finite element method simulation in bulk acoustic wave devices

作者：Li, Xinyi^*; Bao, Jingfu; Huang, Yulin; Zhang, Benfeng; Omori, Tatsuya; Hashimoto, Ken-ya

来源：Japanese Journal of Applied Physics, 2018, 57(7): 07LC08.

DOI：10.7567/JJAP.57.07LC08

• PERFECTLY MATCHED LAYER

In this paper, we propose the use of the hierarchical cascading technique (HCT) for the finite element method (FEM) analysis of bulk acoustic wave (BAW) devices. First, the implementation of this technique is presented for the FEM analysis of BAW devices. It is shown that the traveling-wave excitation sources proposed by the authors are fully compatible with the HCT. Furthermore, a HCT-based absorbing mechanism is also proposed to replace the perfectly matched layer (PML). Finally, it is demonstrated how the technique is much more efficient in terms of memory consumption and execution time than the full FEM analysis.

• 出版日期2018-7
• 单位上海交通大学; 电子科技大学