A new open-loop driving method of piezoelectric actuator for periodic reference inputs

作者：Ru Changhai^*; Sun Lining

来源：Ultrasonics, 2006, 44: E633-E637.

DOI：10.1016/j.ultras.2006.05.198

• piezoelectric actuator
• hysteresis
• feedforward control

The hysteresis characteristic of piezoelectric actuators is one of the major defficiencies in a wide variety of precise tracking positioning controls. In this paper, a novel mathematical model is proposed to describe hysteresis precisely and an open- loop tracking controller is implemented with the proposed model to compensate the hysteresis for tracking periodic sinusoidal inputs. Finally, some tracking control experiments based on a micro- positioning stage for the desired sinusoidal trajectory are performed according to the proposed method and the experimental results demonstrate that the positioning precision is noticeably improved in the open- loop operation compared to the conventional open- loop control without any compensation. In comparison to the regular PID closed- loop controller, the proposed feedforward control method has better tracking performance.

• 出版日期2006-12-22
• 单位哈尔滨工程大学