Note: A novel rotary actuator driven by only one piezoelectric actuator

作者:Huang Hu; Fu Lu; Zhao Hongwei*; Shi Chengli; Ren Luquan; Li Jianping; Qu Han
来源:Review of Scientific Instruments, 2013, 84(9): 096105.
DOI:10.1063/1.4821495

摘要

This paper presents a novel piezo-driven rotary actuator based on the parasitic motion principle. Output performances of the rotary actuator were tested and discussed. Experiment results indicate that using only one piezoelectric actuator and simple sawtooth wave control, the rotary actuator reaches the rotation velocity of about 20 097 mu rad/s when the driving voltage is 100 V and the driving frequency is 90 Hz. The actuator can rotate stably with the minimum resolution of 0.7 mu rad. This paper verifies feasibility of the parasitic motion principle for applications of rotary actuators, providing new design ideas for precision piezoelectric rotary actuators.