An analytical thermal-structural model of a gas-sealed capacitive pressure sensor with a mechanical temperature compensation structure

作者：Hao Xiuchun^*; Maenaka Kazusuke; Takao Hidekuni; Higuchi Kohei

来源：Sensors and Actuators A: Physical , 2014, 205: 92-102.

DOI：10.1016/j.sna.2013.10.029

• Capacitive pressure sensor
• Thermal-structural model
• Gas-sealed
• Mechanical temperature compensation

A coupled thermal-structural model of a gas-sealed capacitive pressure sensor is presented. The gas-sealed capacitive pressure sensor is used specifically for human activity monitoring, to measure atmospheric pressure in our research. A mechanical temperature compensation structure is utilized to reduce the thermal drift of the gas-sealed pressure sensor. In order to determine the compensation results of the temperature compensation structure, a thermal-structural model is presented. Classical laminated plate theory is used to derive the equations of equilibrium for clamped circular laminated plates containing one or more layers. Methods to estimate the model parameters and types of compensation structures are discussed, and model verification via experimentation is presented. The findings indicate that the resultant model is relevant, thus enabling the design of a mechanical compensation structure for a gas-sealed capacitive pressure sensor, to reduce thermal drift.