摘要
A novel all-optical cantilever-enhanced photoacoustic spectroscopy technique for trace gas detection in the open environment is proposed. A cantilever is set off-beam to "listen to" the photoacoustic signal, and an improved quadrature-point stabilization Fabry-Perot demodulation unit is used to pick up the vibration signal of the acoustic transducer instead of a complicated Michelson interferometer. The structure parameters of the cantilever are optimized to make the sensing system work more stably and reliably using a finite element method, which is then fabricated by surface micro-machining technology. Finally, related experiments are carried out to detect the absorption of water vapor at one atmosphere in the open environment. It was found that the normalized noise-equivalent absorption coefficient obtained by a traditional Fabry-Perot demodulation unit is , while that by a quadrature- point stabilization Fabry-Perot demodulation unit is , which indicates that the sensitivity is increased by a factor of 3.1 using improved cantilever-enhanced photoacoustic spectroscopy.
- 出版日期2015-6
- 单位重庆大学