Understanding dielectric breakdown and related tool wear characteristics in nanoscale electro-machining process

作者：Virwani K R^*; Malshe A P; Rajurkar K P

来源：CIRP Annals - Manufacturing Technology, 2007, 56(1): 217-220.

DOI：10.1016/j.cirp.2007.05.098

• electrical discharge machining
• scanning tunneling microscope
• nanomanufacturing

To address the need to produce sub-50 nrn scale features for manufacturing of nano / bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (similar to 20nm after in comparison with similar to 35nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.

• 出版日期2007