Dimensional variation in production of high-aspect-ratio micro-pillars array by micro powder injection molding

作者：Li S G^*; Fu G; Reading I; Tor S B; Loh N H; Chaturvedi P; Yoon S F; Youcef Toumi K

来源：Applied Physics A, 2007, 89(3): 721-728.

DOI：10.1007/s00339-007-4150-2

Micro powder injection molding (mu PIM) is one of the potential processes for the mass production of metallic microstructures and micro components. Here, mu PIM is the miniaturization of conventional PIM, which involves four processing steps: mixing, injection molding, debinding and sintering. This paper looks into the feasibility and effectiveness of mu PIM as a key mass production process for the fabrication of metallic micro components. For it to be an effective re-production process, it is imperative to examine how well parts can be duplicated/fabricated from a master mold. In this work, the dimensional variation of high-aspect-ratio micro-pillars arrays, in particular the dimensional shrinkage, global warpage, and surface roughness at each stage of the mu PIM process for a range of molding pressures, are quantified and compared in detail. The sensitivity of the dimensional variation of the microstructures to the packing pressure is reported. The mechanism behind the dimensional variation is analyzed.

• 出版日期2007-11