Generation of Surface Plasmon Resonance and Lossy Mode Resonance by thermal treatment of ITO thin-films

作者：Del Villar I^*; Zamarreno C R; Hernaez M; Sanchez P; Arregui F J; Matias I R

来源：Optics and Laser Technology, 2015, 69: 1-7.

DOI：10.1016/j.optlastec.2014.12.012

• Thin films
• Optical resonance
• Sensors

Silicon wafers coated with Indium Tin Oxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields.

• 出版日期2015-6