Analysis of Multilayer Devices for Superconducting Electronics by High-Resolution Scanning Transmission Electron Microscopy and Energy Dispersive Spectroscopy

作者：Missert Nancy^*; Kotula Paul G; Rye Michael; Rehm Laura; Sluka Volker; Kent Andrew D; Yohannes Daniel; Kirichenko Alex F; Vernik Igor V; Mukhanov Oleg A; Bolkhovsky Vladimir; Wynn Alex; Johnson Leonard; Gouker Mark

来源：IEEE Transactions on Applied Superconductivity, 2017, 27(4): 1100704.

DOI：10.1109/TASC.2017.2669579

• Josephson junctions
• magnetic multilayers
• super-conducting materials
• scanning transmission electron microscopy

A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

• 出版日期2017-6
• 单位MIT