Natural square ruler at nanoscale

作者：Deng, Xiao^*; Liu, Jie; Zhu, Li; He, Pengfei; Cheng, Xinbin^*; Li, Tongbao

来源：Applied Physics Express, 2018, 11(7): 075201.

DOI：10.7567/APEX.11.075201

• TRACEABLE CALIBRATION
• ATOM LITHOGRAPHY
• NANOFABRICATION
• DEPOSITION
• ACCURATE

Perfectly orthogonal two-dimensional gratings are crucial components in the calibration of scanning microscopes and displacement measurements of planar encoders. In this study, we propose a new approach to achieve self-traceable orthogonality by utilizing perpendicular diagonals inside a rhombus shape. Two-step laser-focused Cr atomic deposition is used to fabricate a rhombus array of dots with good uniformity, repeatability, accuracy, and stability. A theoretical analysis indicates that the non-orthogonality uncertainty budget is as low as 0.0027 degrees for the two-dimensional Cr nanogratings with a self-traceable pitch of 212.8 nm, which makes the fabricated two-dimensional gratings promising as a natural square ruler with an extremely low uncertainty at the nanoscale.

• 出版日期2018-7
• 单位同济大学