A 1-kW SWITCHABLE DAMPED CLASS-E POWER AMPLIFIER FOR PLASMA PROCESSING APPLICATIONS

作者：Kim Ji Yeon; Chun Sang Hyun; Jang Dong Hee; Kim Jong Heon^*; Kennedy Gray P

来源：Microwave and Optical Technology Letters, 2010, 52(11): 2438-2441.

DOI：10.1002/mop.25512

• power amplifier
• high efficiency
• class-E amplifier
• switchable damper
• RF generator

In this article, a new highly efficient and highly stable I kW power amplifier is designed and fabricated for plasma processing applications. The efficiency of the generator was Unproved by using a class-E type power amplifier consisting of one push-pull MOSFET and a high-current driver IC instead of a conventional class-C amplifier composed of several single ended MOSFETs. A switchable damper allows a selection of one of three different amplifier modes; these modes adjust the amplifier's efficiency and stability. The amplifier dimensions were reduced by 30% compared with the conventional class-C power amplifier. Also, a drain efficiency of 80% was produced for a generator output power of I kW and operating frequency of 13.56 MHz.

• 出版日期2010-11