科研之友
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摘要
Extreme ultraviolet (EUV) spectra from laser-produced plasmas of a tin-gold alloy have been recorded for a number of power densities (Phi = 8.1 x 10(11) to 5.5 x 10(12) Wcm(-2)) by varying the incident laser energy and focusing conditions. The experimental results show that the emission profile in the EUV region between 13 and 18 nm is almost constant and there is no significant difference in the shape of EUV spectra recorded at high power densities of up to 5.5 x 10(12) Wcm(-2). To better understand the contribution of each element in the alloy, spectra from pure tin and gold targets were also obtained under the same experimental conditions. In addition, the conversion efficiency (CE) of laser to EUV energy was determined. The insensitivity of the spectral profile of the alloy to laser input energy and focusing conditions coupled with the high laser power to EUV CE in the 10 nm to 18 nm range (up to 47%), along with its high intensity at 13.5 nm, the wavelength used for EUV lithography, and the low melting temperature of the alloy (280 degrees C) make it an ideal target for a broadband metrology light source.
- 出版日期2013-12-11
