A noncontact scanning electrostatic force microscope for surface profile measurement

作者：Gao Wei^*; Goto Shigeaki; Hosobuchi Keiichiro; Ito So; Shimizu Yuki

来源：CIRP Annals - Manufacturing Technology, 2012, 61(1): 471-474.

DOI：10.1016/j.cirp.2012.03.097

• Metrology
• Profile
• Probe

A scanning electrostatic force microscope is presented for noncontact surface profile measurement. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.

• 出版日期2012