A MEMS linear accelerator for levitated micro-objects

作者：Sari Ibrahim^*; Kraft Michael

来源：Sensors and Actuators A: Physical , 2015, 222: 15-23.

DOI：10.1016/j.sna.2014.11.008

• Microactuators
• Linear accelerator
• Micro-injector
• Electromagnetic levitation
• Electrostatic propulsion

In this work, the design, micro-fabrication, and characterization steps of a contactless linear accelerator is presented. The proposed design in principle can levitate conductive micro-objects and accelerate or move them over a predefined trajectory. The levitation is realized using electromagnetic induction generated by a changing AC field whereas the propulsion is achieved through electrostatic forces from a controlled DC source. This is the first time in literature that such a hybrid design is used to accomplish this idea. It has been experimentally shown that the proposed design can levitate 1 mm x 1 mm sized and 7 mu m thick micro-objects to a maximum height of 75 mu m and propel them forward continuously at a maximum average forward velocity of 3.6 mm/s.

• 出版日期2015-2-1