A modified analytical model to study the sensing performance of a flexible capacitive tactile sensor array

作者：Liang, Guanhao^*; Wang, Yancheng; Mei, Deqing; Xi, Kailun; Chen, Zichen

来源：Journal of Micromechanics and Microengineering, 2015, 25(3): 035017.

DOI：10.1088/0960-1317/25/3/035017

• tactile sensor array
• flexible capacitive sensor
• analytical model
• Ritz method

This paper presents a modified analytical model to study the sensing performance of a flexible capacitive tactile sensor array, which utilizes solid polydimethylsiloxane (PDMS) film as the dielectric layer. To predict the deformation of the sensing unit and capacitance changes, each sensing unit is simplified into a three-layer plate structure and divided into central, edge and corner regions. The plate structure and the three regions are studied by the general and modified models, respectively. For experimental validation, the capacitive tactile sensor array with 8 x 8 (= 64) sensing units is fabricated. Experiments are conducted by measuring the capacitance changes versus applied external forces and compared with the general and modified models' predictions. For the developed tactile sensor array, the sensitivity predicted by the modified analytical model is 1.25%/N, only 0.8% discrepancy from the experimental measurement. Results demonstrate that the modified analytical model can accurately predict the sensing performance of the sensor array and could be utilized for model-based optimal capacitive tactile sensor array design.

• 出版日期2015-3
• 单位浙江大学