摘要
A laser heterodyne interferometer for angle measurement based on the Faraday effect is proposed. A novel optical configuration, designed by using the orthogonal return method for a linearly polarized beam based on the Faraday effect, guarantees that the measurement beam can return effectively even though an angular reflector has a large lateral displacement movement. The optical configuration and measurement principle are presented in detail. Two verification experiments were performed; the experimental results show that the proposed interferometer can achieve a large lateral displacement tolerance of 7.4 mm and also can realize high precision angle measurement with a large measurement range. Published by AIP Publishing.
- 出版日期2018-4
- 单位浙江理工大学